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In this application, the Nanovea Mechanical Tester, in nano scratch testing mode, is used to measure the fracture resistance of a 170μm thick silicon sample. We must simulate the process of scratching in a controlled and monitored manner to observe sample behavior effects. A 2μm diamond tipped stylus is used at a progressive load ranging from 0.5 mN to 400 mN to scratch the silicon surface. Points of failure will be reviewed.
