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FLATNESS | WARPAGE
What can we do?
• Flatness <1um over 500mm with no correction
FLATNESS | WARPAGE ANALYSIS
• 3D & 2D surface waviness & flatness
• Best polynomial match
• Material & bearing ratios
• Distance measurement
• FLTt peak to valley flatness deviation of the surface
• FLTp peak to reference flatness deviation
• FLTv reference to valley flatness deviation
• FLTq rms flatness deviation
AND MORE
TESTING STANDARDS
- ISO 25178, ISO 4287, ISO 13565-2, ISO 12085, ISO 12780, ISO 12181
* Instrument parameter limits may differ from those specified within the standard.
How can we help?
Application Notes
