Application Note | Step Height
Step Height Measurement of Printed Electrodes Using 3D Profilometry
Micron-Level Heights and Lateral Dimensions on a Wavy, Flexible Substrate
Research & Experimental Testing
Andrea Herrmann
Visual Design & Editorial
Andrew Shore
Introduction
Accurately measuring step heights and lateral dimensions is very important to a vast range of industries. The measurements in this article were taken from printed electrodes on a flexible ceramic sheet. This highlights the users’ ability to measure very small features on wavy, uneven and/or angled samples. Measurements were taken without any special care to flatten or level the flexible samples, and the analysis software was then used to level and remove any overall form or waviness and calculate dimensions. Single line passes can be done in seconds with automated results through macro templates.
Importance of 3D Non-Contact Profilometry for Step Height Measurement
Unlike other techniques such as touch probes or interferometry, the 3D Non-Contact Profilometer, using axial chromatism, can measure nearly any surface; sample sizes can vary widely due to open staging and there is no sample preparation needed. Nano through macro range is obtained during surface profile measurement with zero influence from sample reflectivity or absorption, with advanced ability to measure high surface angles and no software manipulation of results. It easily measures any material: transparent, opaque, specular, diffusive, polished, rough, etc. The technique of the non-contact profilometer provides an ideal, broad and user friendly capability to maximize surface studies when step heights are needed, along with the benefits of combined 2D and 3D capability.
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Measurement Objective
In this application, the NANOVEA ST400 Profilometer is used to measure printed electrodes on a flexible ceramic sheet. The area measured was large enough that it could be extrapolated to make assumptions about a much larger surface. Height and lateral dimensions are measured to characterize the rectangular features on these samples.
NANOVEA ST400 Standard
Optical 3D Profilometer
Results
3D Surface
The 3D view and false color view show a randomly selected area on the sample surface after the waviness has been removed. They provide users a straightforward tool to directly observe the distribution and morphology of the surface features from different angles.
2D Surface Analysis
The surface features can be quantified in numerous ways using built-in software tools, as shown in the following figures as examples. It can be observed that the features range in height from 2.8 µm to 3.3 µm. They are also 0.42 mm to 0.45 mm in width, and 3.00 mm to 3.03 mm in length.
| Parameter | Step 1 | Step 2 | Step 3 | Step 4 |
|---|---|---|---|---|
| Width (mm) | 0.4459 | 0.4162 | 0.4162 | 0.4360 |
| Maximum height (µm) | 4.606 | 4.521 | 4.272 | 4.433 |
| Mean height (µm) | 3.279 | 3.244 | 3.139 | 3.287 |
Table 1: Profile step height results (from Fig. 5).
Conclusion
In this application, we have shown how the NANOVEA 3D Non-Contact Profilometer is capable of precisely characterizing the height and lateral dimensions of a wide variety of surface features. The data shows the rectangular features to be 2.8 µm to 3.3 µm in height, 0.42 mm to 0.45 mm in width, and 3.00 mm to 3.03 mm in length. The data shown here represents only a portion of the calculations available in the analysis software.
Frequently Asked Questions About Printed Electrode Measurement
Do flexible samples need to be flattened?
No. The sheet was measured without any special care to flatten or level it; the software then levelled the data and removed the overall form and waviness before calculating dimensions.
How high are the printed electrodes?
Between 2.8 and 3.3 µm, depending on the method: contour analysis gave 2.779 to 2.936 µm, profile step mean heights 3.139 to 3.287 µm, and an area step 3.318 µm.
What are their lateral dimensions?
The rectangular features are 0.42 to 0.45 mm wide and 3.00 to 3.03 mm long.
How fast can this be inspected?
Single line passes can be done in seconds, with automated results through macro templates.
Which analysis tools were used?
A 3D view and false color view after waviness removal, an area step-height study between two regions, profile step heights across several features and contour analysis along a feature.
Why non-contact for this?
It measures very small features on wavy, uneven or angled samples without touching them and with no influence from reflectivity.
