Large Area Optical Profilometer – NANOVEA ST500

NANOVEA ST500 is a large area optical profilometer for non-contact surface measurement, designed for high-speed scanning of oversized samples.

Built on NANOVEA’s chromatic light technology, the ST500 delivers accurate 2D and 3D surface characterization with continuous scanning over extended travel ranges, making it ideal for applications where area coverage, speed, and measurement reliability are critical.

NANOVEA ST500 large area optical profilometer for high-speed non-contact surface measurement

400 mm @ 200 mm/s
CONTINUOUS SCAN

400 x 400 mm X-Y axis travel with speeds up to 200 mm/s. Delivers ultrafast measurements.
Stitching Free!

NANOVEA ST500 open platform profilometer

Unmatched ultrafast scanning at

384,000 points/s

HIGH QUALITY QUALITY CONTROL

Fully programmable… The Only system you need for Quality Control and Research with nanometer accuracy.

Profilometer scan area specification

X – Y Scan Area

400 x 400 mm Motorized

Profilometer high range and vertical resolution specification

Height Range

nm to cm

Profilometer footprint specification

Desktop Dimensions

97 x 72 x 92 cm

Profilometer scan speed specification

Scan Speed

200 mm/s

Profilometry - Chromatic Confocal Sensor Technology
Best for steep angles
Fast for large areas
Very easy to use
No Image Stitching
No Sample Prep
No Refocusing

What is the NANOVEA ST500?

The NANOVEA ST500 is a large area 3D optical profilometer for non-contact surface measurement of big parts and many samples at once. Its motorized 400 x 400 mm X-Y stage scans at up to 200 mm/s, measuring roughness, texture, form, flatness, step height and volume with chromatic light sensors on any material, transparent or opaque.

A continuous 400 mm scan needs no stitching. The Z axis has 50 mm of motorized travel plus a 140 mm manual slide. Point sensors cover height ranges from 110 µm to 24 mm; high-speed line sensors measure 192 points at once at 384,000 points per second. Rotational options (stage or cylinder) and 4-axis customization extend it beyond a standard profilometer.

The ST500 is fully programmable for automated quality control and research, on a spacious open desktop platform.

Best for

  • Oversized parts and panels, up to 400 x 400 mm
  • Automated measurement of many samples in one run
  • Production quality control where throughput matters
  • Large-area flatness, texture and defect mapping

ST500 at a glance

X-Y stage travel
400 x 400 mm, motorized
X-Y max speed
200 mm/s
Z axis
50 mm motorized + 140 mm manual slide
Continuous scan
400 mm, stitching free
Sensors
Point (PS1 to PS6) and high-speed line (LS1 to LS3)
Acquisition rate
Up to 384,000 points/s (line sensor)
Max vertical resolution
1 nm
Footprint
97 x 72 x 92 cm

ST500 specifications

ST500 platform

X-Y stage travel400 x 400 mm, motorized
X-Y max speed200 mm/s
Z axis50 mm motorized + 140 mm with manual slide
Rotational optionsStage or cylinder rotation; 4-axis customization
AutomationFully programmable
Video microscopeUp to 50x objective magnification, 1200 x 1600 color video camera, stitching and focus stacking
Max vertical resolution1 nm
Max surface angleUp to 87°
Dimensions97 x 72 x 92 cm

Standard chromatic sensors (single point)

SpecificationPS1PS2PS3PS4PS5PS6
Max height range110 µm300 µm1.1 mm3.5 mm10 mm24 mm
Working distance3.3 mm10.8 mm12.2 mm16.5 mm26.6 mm20 mm
Lateral X-Y accuracy0.8 µm1.7 µm2.6 µm4.6 µm11.0 µm11.0 µm
Height repeatability1.9 nm5.4 nm15.8 nm31.6 nm117.0 nm237.2 nm

Height repeatability: fixed point measurement on glass, Ra average height variation for 1,200 points (100 samplings).

High-speed chromatic line sensors (192 points)

SpecificationLS1LS2LS3
Max height range200 µm0.95 mm3.9 mm
Working distance5.3 mm18.5 mm41 mm
Height repeatability (Ra)14 nm21 nm70 nm
Line width0.96 mm1.91 mm4.78 mm
Pitch5 µm10 µm25 µm
Lateral accuracy of each point1 µm2 µm5 µm
Acquisition rate384 kHz384 kHz384 kHz

Height repeatability: fixed point measurement on glass, Ra average height variation for 1,200 points (100 samplings).

Specifications subject to change. Every NANOVEA instrument is built to order; ask for the configuration that fits your samples.

What the ST500 measures

Standards

  • ISO 4287
  • ISO 13565
  • ISO 12085
  • ISO 12780
  • ISO 12181
  • ISO 25178
  • Other ISO & ASME standards

Options and configurations

High-speed line sensors
LS1 to LS3: 192 points per line at 384,000 points per second, height ranges from 200 µm to 3.9 mm.
Rotational and 4-axis configurations
Stage or cylinder rotation and 4-axis customization for round parts and complex geometries.
Video microscope
Up to 50x objective with a 1200 x 1600 color camera, with stitching and focus stacking.
Programmable automation
Multi-sample sequences and recipes for unattended quality control.

Choosing between models

Related application notes

Studies from our laboratory on this class of instrument, published with full test parameters.

All related application notes →

Independent published research

NANOVEA instruments appear in 444 published studies on surface topography and roughness, by researchers at universities and industrial laboratories worldwide.

All 444 studies →

ST500: frequently asked questions

What is the ST500 used for?

Fast, non-contact 3D measurement of large parts or many samples: roughness, texture, flatness and warpage, geometry, step height and volume, for production quality control and research.

How large an area can the ST500 measure?

The motorized stage travels 400 x 400 mm and scans 400 mm continuously without stitching. Rotational stages and 4-axis customization are available for round parts.

How fast is the ST500?

The stage moves at up to 200 mm/s, and a high-speed line sensor measures 192 points simultaneously at 384,000 points per second.

Can the ST500 run unattended?

Yes. It is fully programmable, so multi-sample sequences, measurement recipes and analysis run automatically.

Which sensors does the ST500 use?

The same chromatic light sensors as the rest of the range: point sensors PS1 to PS6 (110 µm to 24 mm height range, 1.9 nm to 237.2 nm repeatability) and line sensors LS1 to LS3 (200 µm to 3.9 mm, 14 nm to 70 nm repeatability).

How much does an ST500 cost?

Pricing depends on sensors, automation and options. Contact NANOVEA sales for a quote; our laboratory can measure your parts first.