Application Note | High-Speed Inspection

High-Speed Scanning with Non-Contact Profilometry

Step Height, Radius, and Roughness of a Machined Part from a Measurement Taking Less Than 5 Seconds

Engineer scanning a machined part with a portable profilometer

Research & Experimental Testing

Jocelyn Esparza & Pierre Leroux

Visual Design & Editorial

Andrew Shore

Introduction

Quick and easy set-up surface measurements save time, effort and are essential for quality control, research and development and production facilities. The NANOVEA Non-Contact Profilometer is capable of performing both 3D & 2D surface scans to measure nano to macro scale features on any surface, providing broad range usability.

Why Profilometry Matters for Fast 2D Measurement

Unlike other techniques such as touch probes or interferometry, the Non Contact Profilometer, using axial chromatism, can measure nearly any surface, sample sizes can vary widely due to open staging and there is no sample preparation needed. Nano through macro range is obtained during surface measurement with zero influence from sample reflectivity or absorption, has advanced ability to measure high surface angles and there is no software manipulation of results. Easily measure any material: transparent, opaque, specular, diffusive, polished, rough etc. The technique of the Non Contact Profilometer provides an ideal, broad and user friendly capability to maximize surface studies with the benefits of combined 2D & 3D capability.

Measurement Objectives

In this application the NANOVEA HS2000 Profilometer is used to measure roughness, step heights and other dimensions on a machined part. All of these calculations are made from a single 2D measurement that takes less than 5 seconds to obtain. This speed and ease of use combined with highly accurate data makes the NANOVEA Profilometer a valuable tool for a wide range of applications.

NANOVEA ST500 Large Area

Optical 3D Profilometer

NANOVEA ST500 large area optical profilometer for non-contact 3D surface measurement

Sample

Machined metal part on the perforated stage under the optical pen of the NANOVEA HS2000
Fig. 1: Sample tested on the NANOVEA HS2000.

Results and Discussion

The roughness, step height and contour were used to calculate various dimensions from a single line profile measurement.

False-color height map of the machined part over 14 mm with two rounded grooves
Fig. 2: False color view.
Profile across the two grooves with step heights of 3.925 and 4.097 mm, radii of 1.767 and 1.746 mm and widths of 3.556, 2.844 and 3.575 mm
Fig. 3: Dimensional analysis.
DimensionValue
Step height, left groove3.925 mm
Step height, right groove4.097 mm
Average step height4.011 mm
Groove radius, left / right1.767 mm / 1.746 mm
Average radius1.757 mm
Groove width, left / right3.556 mm / 3.575 mm
Land between grooves2.844 mm

Table 1: Dimensions of the machined grooves, as measured in Fig. 3.

Area extracted between the grooves, its false-color roughness map and ISO 25178 height parameters
Fig. 4: False color view of the extracted area and height parameters for surface roughness.
ISO 25178 parameterValue
Sa0.2538 µm
Sq0.3227 µm
Ssk0.1986
Sku3.439
Sz2.999 µm
Sp1.615 µm
Sv1.384 µm
Spar4.000 mm²
Sdar4.007 mm²

Table 2: Height parameters of the extracted area shown in Fig. 4.

3D view of the roughness of the extracted area
Fig. 5: 3D view of surface roughness.
Mean roughness profile over 2 mm with its envelope of individual profiles
Fig. 6: Mean profile.
ISO 4287 parameterMeanStd devMinMax
Primary profile
Pa (µm)0.23980.026430.18090.3381
Pz (µm)1.7530.27501.2082.571
Pq (µm)0.30320.03300.23040.4180
Roughness profile (Gaussian filter, 0.8 mm)
Ra (µm)0.22450.027030.15550.3198
Rz (µm)1.4370.25560.90342.557
Rq (µm)0.28390.03340.20230.4041

Table 3: Amplitude parameters of the primary and roughness profiles, from the profiles shown in Fig. 6.

Conclusion

In this application, we have shown how the NANOVEA Non-Contact Profilometer can precisely measure roughness, various heights, widths, and other dimensions from a single 3D measurement that takes seconds to obtain. The data shows an average step height of 4.011 mm, an average radius of 1.757 mm, an average surface roughness of 0.254 µm as well as other dimensions and height parameters. These measurements are relevant to a huge range of applications, from precision machined parts to biomedical products to electronics. The data shown here represents only a portion of the calculations available in the analysis software.

Frequently Asked Questions About High-Speed Non-Contact Profilometry

Why does measurement speed matter in surface inspection?

Quick, easy-to-set-up surface measurements save time and effort and are essential for quality control, research and development and production facilities.

What can be measured from one fast profilometer scan?

Roughness, step heights, radii, widths and other dimensions. On this machined part, a measurement taking less than 5 seconds gave an average step height of 4.011 mm, an average groove radius of 1.757 mm and an average surface roughness of 0.254 µm.

Why use a chromatic confocal profilometer instead of a touch probe or interferometer?

Using axial chromatism, it measures nearly any surface with open staging for a wide range of sample sizes and no sample preparation, from nano to macro range, with zero influence from reflectivity or absorption, high surface angle capability and no software manipulation of results.

How are step height and radius measured on a groove?

A profile is extracted across the grooves and dimensional analysis fits the radius of each groove bottom and measures the step heights, groove widths and land between grooves.

Which roughness parameters were reported?

ISO 25178 area parameters (Sa 0.2538 µm, Sq 0.3227 µm, Sz 2.999 µm) on an extracted area, and ISO 4287 profile parameters with their mean, standard deviation, minimum and maximum, such as Ra 0.2245 µm.

Which NANOVEA instrument performed the high-speed scan?

The NANOVEA HS2000 profilometer, designed for high-speed inspection and large-area flatness. Its current large-area counterpart is the NANOVEA ST500.

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