SURFACE FLATNESS MEASUREMENT | WARPAGE & PLANARITY

The chromatic confocal technique is ideal for measurement of surface flatness, warpage and planarity on applications where it is often critical such as for micro parts, glass, seals and many others. Because no stitching is needed for large surfaces, the chromatic confocal technique can accurately measure in seconds these in addition to detecting local defects.  With the HS2000, surface flatness can be measured on the full 400x500mm area with less than 1micron of deviation in a very short time.  It is also possible to obtain the best match polynomial of the shape that causes deviation in surface flatness. With pattern recognitions and automation, in addition to pass fail conditions and database communication, the instrument can be used as an advanced quality control tool.

Standards:

• ISO 25178
• ISO 4287
• ISO 13565-2
• ISO 12085
• ISO 12780
• ISO 12181

Standard Measurement Analysis:

• 3D and 2D surface waviness and flatness
• Best polynomial match
• Material and bearing ratios

Software Features:

• Easily defined line or area scans
• Recipes
• Lateral resolution
• Export raw data and images
• Real time display
• Automatic reporting
• Multi-language support
• Mapping

Analysis Software Features:

• Filtering
• Leveling
• Thresholding
• Zooming
• Area selection and form removal tools
• Subtract and compare functions and many others

Advanced Automation:

• Automatic focus (optical and microscope), automatic analysis template
• Multi sample handling macros
• Easy selection of area under the microscope for profiling or AFM testing
• Automatic dual frequency for surfaces with varying reflectivities
• Rotational stage
• Pattern recognition
• Database communications
• Pass/Fail limits
• Line sensors for up to 200 times faster measurements

Sample(s) Holders and Environmental Conditions:

• Custom and standard sample holders
• Heating stage

Additional Surface Measurements:

Surface Roughness Measurement

Surface Profile Measurement

Surface Topography Measurement

Surface Volume Measurement

Surface Step Height Measurement