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With a wide range of height, up to 25mm and a fast linear speed capability, the chromatic confocal technique is ideal for measuring flatness, warpage and planarity on applications where critical such as micro parts, glass, seals and many others. Because no stitching is needed for large surfaces, the chromatic confocal technique can accurately measure in seconds these in addition to detecting local defects. It is also possible to obtain the best match polynomial of the shape that causes deviation in flatness. With pattern recognitions and automation, in addition to pass fail conditions and database communication, the instrument can be used as an advanced quality control tool.

• ISO 25178 • ISO 4287 • ISO 13565-2 • ISO 12085 • ISO 12780 • ISO 12181

Standard Measurement Analysis:
• 3D and 2D surface waviness and flatness • Best polynomial match • Material and bearing ratios

Software Features:
Easily defined line or area scansRecipes • Lateral resolution • Export raw data and images • Real time display • Automatic reporting • Multi-language support • Mapping

Analysis Software Features:
• Filtering • Leveling • Thresholding • Zooming • Area selection and form removal tools • Subtract and compare functions and many others

Advanced Automation:
• Automatic focus (optical and microscope), automatic analysis template • Multi sample handling macros • Easy selection of area under the microscope for profiling or AFM testing • Automatic dual frequency for surfaces with varying reflectivities • Rotational staging • Pattern recognition • Database communications • Pass/Fail limits
• Line sensors for up to 200 times faster measurements

Sample(s) Holders and Environmental Conditions:
• Custom and standard sample holders • Heating stage

Additional Surface Measurements:
Surface Roughness Measurement
Surface Profile Measurement
Surface Topography Measurement
Surface Volume Measurement
Surface Step Height Measurement

App Notes