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Category: Stepheight & Thickness

 

500nm Glass Step Height: Extreme Accuracy with Non-Contact Profilometry

Surface characterization are current topics undergoing intense study. The surfaces of materials are important since they are the regions where physical and chemical interactions between the material and environment occur. Thus, being able to image the surface with high resolution has been desirable, since it allows scientists to visually observe the smallest surface details. Common surface imaging data includes topography, roughness, lateral dimensions, and vertical dimensions. Identifying the load bearing surface, spacing and step height of fabricated microstructures, and defects on the surface are some applications that can be obtained from surface imaging. All surface imaging techniques, however, are not created equal.

500nm Glass Step Height: Extreme Accuracy with Non-Contact Profilometry

Wafer Coating Thickness Measurement Using 3D Profilometry

Wafer Coating Thickness Measurement is critical. Silicon wafers are widely used in the making of integrated circuits and other micro devices used in a vast number of industries. A constant demand for thinner and smoother wafers and wafer coatings makes the Nanovea 3D non-contact Profilometer a great tool to quantify coating thickness and roughness of just about any surface. The measurements in this article were taken from a coated wafer sample in order to demonstrate the capabilities of our 3D Non-Contact Profilometer.

Wafer Coating Thickness Measurement Using 3D Profilometry

Transparent Film on Transparent Substrate Measurement

The Nanovea PS50 Profilometer is used for roughness measurement, step height thickness and optical thickness of a thin transparent film on a transparent glass substrate. Step height will be obtained by measuring an area of the film and an area where the substrate is exposed for relative height difference, while optical thickness will be measured by using the Profilometer capability of measuring through the transparent film and detecting a reflecting both from the top surface of the film and the substrate simultaneously.

Transparent Film on Transparent Substrate Measurement Using 3D Profilometry

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